VMZ Zenith
VMZ zenith with a sub-micron accuracy, is designed specially for high accuracy measurement secnarioses like semiconductor, microassembly and optical communication.
Technical Specification
Optional microscope lens with high magnification of 25-2829x
Programmed six-ring eight-zone ring surface light, Profile light and coaxial light, available illumination configuration to meet different applications
Abundant optical system configuration, meeting requirements of various measuring scenarioses
Granite body structure provides high precision and stability
Application of nanoscale ultra-low expansion coefficient scale, ensuring high precision and stability
Optional Chromatic Confocal